Fabricated Quartzware for single-wafer applications
In single-wafer applications each silicon wafer is treated seperately. First-class quartzware for single-wafer systems include
- Profiled rings for shieldings
- Quartz domes
- Gas distribution plates
- Various chamber components
Heraeus Quarzglas support all common single-wafer applications like plasma etch, epitaxial deposition, rapid thermal processing, and more. We manufacture quartz components for all technologies up to the actual wafer size of 200mm (12inch). In addition, Heraeus Quarzglas has in-house access to a variety of base materials. We also offer special surface treatment and final cleaning – enabling out customers to use our products directly after delivery and without any further treatment.
Optimum performance of high-end quartzware is determined by the design, base materials, surfaces, and cleanliness.
